Inventor · disambiguated record
Alexander Friz
Also filed as: FRIZ ALEXANDER · FRIZ ALEXANDER M
13 granted patents·3 pending applications·39 citations·filing 2003–2020
88Inventor score
Top patents by PatentIndex Score
16 records- 0185US11882770B2Area-selective deposition of metal nitride to fabricate devicesIBM·Filed 2020·Granted Jan 23, 2024·1 cites·20 claims
- 0285US9738765B2Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymersIBM·Filed 2015·Granted Aug 22, 2017·4 cites·31 claims
- 0384US10059820B2Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymersIBM·Filed 2017·Granted Aug 28, 2018·3 cites·21 claims
- 0471US7501215B2Device manufacturing method and a calibration substrateASML NETHERLANDS BV·Filed 2005·Granted Mar 10, 2009·3 cites·9 claims
- 0570US7130049B2Method of measurement, method for providing alignment marks, and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 31, 2006·10 cites·48 claims
- 0658US8802347B2Silicon containing coating compositions and methods of useALLEN ROBERT D·Filed 2009·Granted Aug 12, 2014·0 cites·20 claims
- 0758US7256865B2Methods and apparatuses for applying wafer-alignment marksASML HOLDING NV·Filed 2003·Granted Aug 14, 2007·4 cites·10 claims
- 0856US6914664B2Lithographic apparatus, alignment method and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 5, 2005·5 cites·25 claims
- 0955US7019814B2Lithographic projection mask, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Mar 28, 2006·5 cites·25 claims
- 1051US2007196746A1Methods and apparatuses for applying wafer-alignment marksCONSOLINI JOSEPH·Filed 2007·Application pending·0 cites
- 1148US7531040B2Resist recovery methodASML HOLDINGS N V·Filed 2003·Granted May 12, 2009·2 cites·14 claims
- 1246US7410880B2Method for measuring bonding quality of bonded substrates, metrology apparatus, and method of producing a device from a bonded substrateASML NETHERLANDS BV·Filed 2004·Granted Aug 12, 2008·2 cites·14 claims
- 1339US7041996B2Method of aligning a substrate, a computer program, a device manufacturing method and a device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted May 9, 2006·0 cites·23 claims
- 1438US7320847B2Alternate side lithographic substrate imagingASML NETHERLANDS BV·Filed 2003·Granted Jan 22, 2008·0 cites·26 claims
- 1537US2006035159A1Method of providing alignment marks, method of aligning a substrate, device manufacturing method, computer program, and deviceASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
- 1636US2006138681A1Substrate and lithography process using the sameASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →