Inventor · disambiguated record
Kenji Nebuka
Also filed as: NEBUKA KENJI
4 granted patents·569 citations·filing 1992–1995
84Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0196US5340261ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1992·Granted Aug 23, 1994·389 cites·20 claims
- 0283US5753891ATreatment apparatusTOKYO ELECTRON LTD·Filed 1995·Granted May 19, 1998·74 cites·7 claims
- 0377US5405230ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1992·Granted Apr 11, 1995·68 cites·23 claims
- 0468US5435683ALoad-lock unit and wafer transfer systemTOKYO ELECTRON LTD·Filed 1994·Granted Jul 25, 1995·38 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →