Inventor · disambiguated record

Song Zhigang

Also filed as: ZHIGANG SONG

1 granted patent·0 citations·filing 2001–2001

9Inventor score

Technology areasH10P

Files withCHARTERED SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0122US6689698B2Method for etching a silicided poly using fluorine-based reactive ion etching and sodium hydroxide based solution immersionCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Feb 10, 2004·0 cites·24 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →