Inventor · disambiguated record

George Tkach

Also filed as: TKACH GEORGE

3 granted patents·291 citations·filing 2000–2002

79Inventor score

Technology areasH10P

Files withNOVELLUS SYSTEMS INC3

Top patents by PatentIndex Score

3 records

0192US6673716B1Control of the deposition temperature to reduce the via and contact resistance of Ti and TiN deposited using ionized PVD techniquesNOVELLUS SYSTEMS INC·Filed 2002·Granted Jan 6, 2004·124 cites·18 claims
0290US6652718B1Use of RF biased ESC to influence the film properties of Ti and TiNNOVELLUS SYSTEMS INC·Filed 2002·Granted Nov 25, 2003·75 cites·26 claims
0390US6342133B2PVD deposition of titanium and titanium nitride layers in the same chamber without use of a collimator or a shutterNOVELLUS SYSTEMS INC·Filed 2000·Granted Jan 29, 2002·92 cites·12 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →