Inventor · disambiguated record
Myungsun Choi
Also filed as: Choi Myungsun
8 granted patents·16 citations·filing 2017–2023
80Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD8
Top patents by PatentIndex Score
8 records- 0196US11075089B2Method of plasma etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jul 27, 2021·4 cites·20 claims
- 0296US11075088B2Method of plasma etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jul 27, 2021·4 cites·20 claims
- 0393US11545341B2Plasma etching method and semiconductor device fabrication method including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jan 3, 2023·4 cites·20 claims
- 0487US10622217B2Method of plasma etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 14, 2020·4 cites·9 claims
- 0569US12020903B2Plasma etching method and semiconductor device fabrication method including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jun 25, 2024·0 cites·10 claims
- 0655US12444589B2Operation method of etching apparatus and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Granted Oct 14, 2025·0 cites·20 claims
- 0754US11398397B2Electrostatic chuck and plasma processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Jul 26, 2022·0 cites·20 claims
- 0851US11658039B2Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching methodSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted May 23, 2023·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →