Inventor · disambiguated record
Namjun Kang
Also filed as: KANG NAMJUN
5 granted patents·1 pending application·51 citations·filing 2014–2020
77Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0196US11075089B2Method of plasma etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jul 27, 2021·4 cites·20 claims
- 0296US11075088B2Method of plasma etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Jul 27, 2021·4 cites·20 claims
- 0394US9378931B2Pulse plasma apparatus and drive method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jun 28, 2016·39 cites·20 claims
- 0487US10622217B2Method of plasma etching and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Apr 14, 2020·4 cites·9 claims
- 0543US9721762B2Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipmentSAMSUNG ELECTRONICS CO LTD·Filed 2014·Granted Aug 1, 2017·0 cites·19 claims
- 0637US2018358253A1Electrostatic chuck, a plasma processing apparatus having the same, and a method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →