Inventor · disambiguated record
Hiroyuki Takaba
Also filed as: TAKABA HIROYUKI
9 granted patents·3 pending applications·52 citations·filing 2006–2021
84Inventor score
Files withTOKYO ELECTRON LTD4TAKABA HIROYUKI3RENESAS TECH CORP2FUKIAGE NORIAKI1RENESAS ELECTRONICS CORP1
Top patents by PatentIndex Score
12 records- 0192US8399366B1Method of depositing highly conformal amorphous carbon films over raised featuresTAKABA HIROYUKI·Filed 2011·Granted Mar 19, 2013·40 cites·19 claims
- 0269US9293346B2Method for etching organic film and plasma etching deviceTOKYO ELECTRON LTD·Filed 2013·Granted Mar 22, 2016·2 cites·11 claims
- 0367US9721803B2Etching method for substrate to be processed and plasma-etching deviceTOKYO ELECTRON LTD·Filed 2013·Granted Aug 1, 2017·2 cites·7 claims
- 0465US8778810B2Plasma treatment methodTAKABA HIROYUKI·Filed 2010·Granted Jul 15, 2014·2 cites·24 claims
- 0563US8419859B2Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning methodFUKIAGE NORIAKI·Filed 2008·Granted Apr 16, 2013·3 cites·8 claims
- 0660US8962454B2Method of depositing dielectric films using microwave plasmaTAKABA HIROYUKI·Filed 2011·Granted Feb 24, 2015·1 cites·14 claims
- 0757US7820503B2Semiconductor device and manufacturing method of the sameRENESAS ELECTRONICS CORP·Filed 2008·Granted Oct 26, 2010·1 cites·6 claims
- 0857US7511338B2Semiconductor device and manufacturing method of the sameRENESAS TECH CORP·Filed 2006·Granted Mar 31, 2009·1 cites·6 claims
- 0953US11538900B1Semiconductor device and method of fabricating the sameWINBOND ELECTRONICS CORP·Filed 2021·Granted Dec 27, 2022·0 cites·10 claims
- 1042US2007054503A1Film forming method and fabrication process of semiconductor deviceRENESAS TECH CORP·Filed 2006·Application pending·0 cites
- 1136US2013034970A1Plasma processing methodTOKYO ELECTRON LTD·Filed 2011·Application pending·0 cites
- 1231US2015294839A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →