Inventor · disambiguated record
Yong-Jin Chun
Also filed as: CHUN YONG-JIN
4 granted patents·5 pending applications·5 citations·filing 2002–2015
63Inventor score
Top patents by PatentIndex Score
9 records- 0166US7940373B2Compensating masks, multi-optical systems using the masks, and methods of compensating for 3-D mask effect using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Granted May 10, 2011·2 cites·5 claims
- 0263US8045787B2System for analyzing mask topography and method of forming image using the systemSAMSUNG ELECTRONICS CO LTD·Filed 2008·Granted Oct 25, 2011·2 cites·14 claims
- 0362US9606452B2Lithography metrology method for determining best focus and best dose and lithography monitoring method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Mar 28, 2017·1 cites·20 claims
- 0440US2011177437A1Compensating Masks, Multi-Optical Systems Using the Masks, and Methods of Compensating for 3-D Mask Effect Using the SameSUH SUNG-SOO·Filed 2011·Application pending·0 cites
- 0538US9570364B2Method of detecting focus shift in lithography process, method of analyzing error of transferred pattern using the same and method of manufacturing semiconductor device using the methodsSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Feb 14, 2017·0 cites·8 claims
- 0638US2008076047A1Method of forming image contour for predicting semiconductor device patternSAMSUNG ELECTRONICS CO LTD·Filed 2006·Application pending·0 cites
- 0737US2006197581A1Temperature detecting circuitCHUN YONG-JIN·Filed 2006·Application pending·0 cites
- 0833US2010248155A1Illumination Control Module, and Diffraction Illumination System and Photolithography System Including the Same, and Methods of Fabricating Semiconductors Using the SameSAMSUNG ELECTRONICS CO LTD·Filed 2010·Application pending·0 cites
- 0933US2005170167A1Synthetic fiber containing powders with the shape of hollow sphereFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →