Inventor · disambiguated record
Shuhei Yabu
Also filed as: YABU Shuhei
6 granted patents·4 citations·filing 2016–2020
70Inventor score
Technology areasH01J
Files withHITACHI HIGH TECH CORP6
Top patents by PatentIndex Score
6 records- 0178US11348757B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2018·Granted May 31, 2022·2 cites·14 claims
- 0274US11348758B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted May 31, 2022·2 cites·11 claims
- 0360US10910194B2Charged particle beam device and optical-axis adjusting method thereofHITACHI HIGH TECH CORP·Filed 2020·Granted Feb 2, 2021·0 cites·4 claims
- 0448US10573489B2Charged particle beam device and optical-axis adjusting method thereofHITACHI HIGH TECH CORP·Filed 2016·Granted Feb 25, 2020·0 cites·14 claims
- 0545US11404237B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Aug 2, 2022·0 cites·8 claims
- 0644US10008361B2Charged particle beam device and installation methodHITACHI HIGH TECH CORP·Filed 2016·Granted Jun 26, 2018·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →