Inventor · disambiguated record
Dongho Heo
Also filed as: HEO DONGHO
7 granted patents·1 pending application·87 citations·filing 2006–2022
86Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0193US7309646B1De-fluoridation processLAM RES CORP·Filed 2006·Granted Dec 18, 2007·25 cites·25 claims
- 0289US8277670B2Plasma process with photoresist mask pretreatmentHEO DONGHO·Filed 2008·Granted Oct 2, 2012·19 cites·19 claims
- 0389US7910489B2Infinitely selective photoresist mask etchLAM RES CORP·Filed 2006·Granted Mar 22, 2011·16 cites·10 claims
- 0485US7838426B2Mask trimmingLAM RES CORP·Filed 2007·Granted Nov 23, 2010·9 cites·16 claims
- 0583US8172948B2De-fluoridation processHEO DONGHO·Filed 2007·Granted May 8, 2012·9 cites·20 claims
- 0679US7785484B2Mask trimming with ARL etchLAM RES CORP·Filed 2007·Granted Aug 31, 2010·7 cites·14 claims
- 0764US8864931B2Mask trimmingGOYAL SUPRIYA·Filed 2010·Granted Oct 21, 2014·2 cites·4 claims
- 0853US2024420963A1Modification of metal-containing surfaces in high aspect ratio plasma etchingLAM RES CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →