Inventor · disambiguated record
Kevin Golden
Also filed as: GOLDEN KEVIN · GOLDEN KEVIN M
6 granted patents·235 citations·filing 1996–2002
86Inventor score
Top patents by PatentIndex Score
6 records- 0192US5618751AMethod of making single-step trenches using resist fill and recessIBM·Filed 1996·Granted Apr 8, 1997·152 cites·20 claims
- 0281US6468586B1Environment exchange control for material on a wafer surfaceSILICON VALLEY GROUP·Filed 2000·Granted Oct 22, 2002·15 cites·12 claims
- 0380US6254936B1Environment exchange control for material on a wafer surfaceSILICON VALLEY GROUP·Filed 1998·Granted Jul 3, 2001·33 cites·22 claims
- 0479US6844027B1Environment exchange control for material on a wafer surfaceASML HOLDING NV·Filed 2000·Granted Jan 18, 2005·13 cites·7 claims
- 0576US6780461B2Environment exchange control for material on a wafer surfaceASML HOLDING NV·Filed 2001·Granted Aug 24, 2004·16 cites·5 claims
- 0666US6911091B2Environment exchange control for material on a wafer surfaceASML NETHERLANDS BV·Filed 2002·Granted Jun 28, 2005·6 cites·35 claims
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