Inventor · disambiguated record
Chris Kimball
Also filed as: KIMBALL CHRIS
2 granted patents·2 pending applications·22 citations·filing 2006–2010
54Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0191US7829468B2Method and apparatus to detect fault conditions of plasma processing reactorLAM RES CORP·Filed 2006·Granted Nov 9, 2010·22 cites·15 claims
- 0245US2011022215A1Apparatus to detect fault conditions of a plasma processing reactorLAM RES CORP·Filed 2010·Application pending·0 cites
- 0334US2011126852A1Electrostatic chuck with an angled sidewallLAM RES CORP·Filed 2010·Application pending·0 cites
- 0426US8906164B2Methods for stabilizing contact surfaces of electrostatic chucksKIMBALL CHRIS·Filed 2010·Granted Dec 9, 2014·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →