Inventor · disambiguated record
Shiro Mishima
Also filed as: MISHIMA SHIRO
12 granted patents·3 pending applications·406 citations·filing 1987–2013
93Inventor score
Top patents by PatentIndex Score
15 records- 0192US5679059APolishing aparatus and methodEBARA CORP·Filed 1995·Granted Oct 21, 1997·110 cites·83 claims
- 0286US5679063APolishing apparatusEBARA CORP·Filed 1996·Granted Oct 21, 1997·81 cites·14 claims
- 0379US5695601AMethod for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the methodTOSHIBA KK·Filed 1995·Granted Dec 9, 1997·60 cites·10 claims
- 0478US6997782B2Polishing apparatus and a method of polishing and cleaning and drying a waferTOSHIBA KK·Filed 2002·Granted Feb 14, 2006·16 cites·20 claims
- 0578US4876856AHeat exchanging systemYAMATO KOSAN KK·Filed 1987·Granted Oct 31, 1989·40 cites·7 claims
- 0670US7198552B2Polishing apparatusTOSHIBA KK·Filed 2005·Granted Apr 3, 2007·2 cites·18 claims
- 0770US5846335AMethod for cleaning workpieceEBARA CORP·Filed 1997·Granted Dec 8, 1998·40 cites·39 claims
- 0867US6500051B1Polishing apparatus and methodEBARA CORP·Filed 1997·Granted Dec 31, 2002·25 cites·57 claims
- 0962US4920750AHeat exchanging system for power generationYAMATO KOSAN KK·Filed 1988·Granted May 1, 1990·20 cites·4 claims
- 1055US2015255005A1Movement evaluation device and program thereforNAT INST OF ADVANCED IND SCIEN·Filed 2013·Application pending·0 cites
- 1147US2013252516A1Polishing pad and polishing methodTOSHIBA KK·Filed 2013·Application pending·0 cites
- 1240US5395645AMethod for forming a silicon oxide film on a silicon wafferTOSHIBA KK·Filed 1992·Granted Mar 7, 1995·9 cites·12 claims
- 1337US2005145500A1Plating apparatus, plating method, and manufacturing method of semiconductor deviceFiled 2004·Application pending·0 cites
- 1433US8614510B2Semiconductor device including a metal wiring with a metal capTOMIZAWA HIDEYUKI·Filed 2010·Granted Dec 24, 2013·0 cites·8 claims
- 1531US5489336AApparatus for forming a silicon oxide film on a silicon waferTOSHIBA KK·Filed 1994·Granted Feb 6, 1996·3 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →