Inventor · disambiguated record
Hilko Dirk Bos
Also filed as: BOS HILKO DIRK
6 granted patents·13 citations·filing 2015–2021
75Inventor score
Files withASML NETHERLANDS BV6
Top patents by PatentIndex Score
6 records- 0189US12276921B2Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology methodASML NETHERLANDS BV·Filed 2021·Granted Apr 15, 2025·2 cites·17 claims
- 0286US10795269B2Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Oct 6, 2020·3 cites·15 claims
- 0383US12105432B2Metrology method and associated computer productASML NETHERLANDS BV·Filed 2020·Granted Oct 1, 2024·2 cites·20 claims
- 0477US9786044B2Method of measuring asymmetry, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Oct 10, 2017·4 cites·20 claims
- 0574US11181828B2Method of determining a value of a parameter of interest of a patterning process, device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Nov 23, 2021·2 cites·20 claims
- 0656US11099489B2Method of measuring a parameter of a lithographic process, metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →