Inventor · disambiguated record
Fumitaka Shoji
Also filed as: SHOJI FUMITAKA
5 granted patents·2 pending applications·986 citations·filing 2011–2025
82Inventor score
Top patents by PatentIndex Score
7 records- 0197US9018093B2Method for forming layer constituted by repeated stacked layersASM IP HOLDING BV·Filed 2013·Granted Apr 28, 2015·519 cites·17 claims
- 0296US9365924B2Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF powerASM IP HOLDING BV·Filed 2013·Granted Jun 14, 2016·463 cites·15 claims
- 0382US2025389023A1Reactor system comprising a tuning circuitASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 0471US10854498B2Wafer-supporting device and method for producing sameSHOJI FUMITAKA·Filed 2011·Granted Dec 1, 2020·4 cites·6 claims
- 0563US12442082B2Reactor system comprising a tuning circuitASM IP HOLDING BV·Filed 2021·Granted Oct 14, 2025·0 cites·19 claims
- 0647US2021225622A1Substrate treatment apparatus and substrate treatment method for monitoring integrated valueASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 0746US10734219B2Plasma film forming methodASM IP HOLDING BV·Filed 2018·Granted Aug 4, 2020·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →