Inventor · disambiguated record
Markus Goeppert
Also filed as: GOEPPERT MARKUS
9 granted patents·2 pending applications·78 citations·filing 2004–2020
84Inventor score
Top patents by PatentIndex Score
11 records- 0192US7336371B1Apparatus and method for measuring the wavefront of an optical systemZEISS CARL SMT AG·Filed 2004·Granted Feb 26, 2008·49 cites·14 claims
- 0285US10006807B2Apparatus for determining an optical property of an optical imaging systemZEISS CARL SMT GMBH·Filed 2016·Granted Jun 26, 2018·3 cites·22 claims
- 0379US7417745B2Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometryZEISS CARL SMT AG·Filed 2004·Granted Aug 26, 2008·21 cites·4 claims
- 0478US8908192B2Method and apparatus for qualifying optics of a projection exposure tool for microlithographyZEISS CARL SMT GMBH·Filed 2013·Granted Dec 9, 2014·3 cites·11 claims
- 0566US8120763B2Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2009·Granted Feb 21, 2012·1 cites·14 claims
- 0659US8836929B2Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT GMBH·Filed 2012·Granted Sep 16, 2014·0 cites·15 claims
- 0757US2009021726A1Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0856US7760345B2Method and apparatus for determining at least one optical property of an imaging optical systemZEISS CARL SMT AG·Filed 2007·Granted Jul 20, 2010·1 cites·31 claims
- 0955US2012113429A1Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2012·Application pending·0 cites
- 1047US9482968B2Measuring systemZEISS CARL SMT GMBH·Filed 2013·Granted Nov 1, 2016·0 cites·18 claims
- 1144US11379500B2Automated data integration, reconciliation, and self healing using machine learningSAP SE·Filed 2020·Granted Jul 5, 2022·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →