Inventor · disambiguated record
Paul Jacobson
Also filed as: JACOBSON PAUL · JACOBSON PAUL T
10 granted patents·1 pending application·517 citations·filing 1998–2018
91Inventor score
Top patents by PatentIndex Score
11 records- 0198US6720531B1Light scattering process chamber wallsASM INC·Filed 2002·Granted Apr 13, 2004·369 cites·11 claims
- 0296US7816236B2Selective deposition of silicon-containing filmsASM INC·Filed 2006·Granted Oct 19, 2010·42 cites·34 claims
- 0391US8088223B2System for control of gas injectorsTODD MICHAEL A·Filed 2006·Granted Jan 3, 2012·14 cites·15 claims
- 0481US9885123B2Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flowHALPIN MICHAEL W·Filed 2011·Granted Feb 6, 2018·3 cites·13 claims
- 0569US10480095B2System for rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flowASM INC·Filed 2018·Granted Nov 19, 2019·0 cites·16 claims
- 0666US6521503B2High temperature drop-off of a substrateASM INC·Filed 2001·Granted Feb 18, 2003·9 cites·16 claims
- 0766US6158951AWafer carrier and method for handling of wafers with minimal contactASM INC·Filed 1998·Granted Dec 12, 2000·34 cites·20 claims
- 0864US6704496B2High temperature drop-off of a substrateASM INC·Filed 2002·Granted Mar 9, 2004·8 cites·12 claims
- 0963US6318957B1Method for handling of wafers with minimal contactASM INC·Filed 1999·Granted Nov 20, 2001·32 cites·13 claims
- 1058US7231141B2High temperature drop-off of a substrateASM INC·Filed 2003·Granted Jun 12, 2007·6 cites·20 claims
- 1145US2009101633A1Reactor with small linear lamps for localized heat control and improved temperature uniformityASM INC·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →