Inventor · disambiguated record
Dixit V. Desai
Also filed as: DESAI DIXIT · DESAI DIXIT V
9 granted patents·9 pending applications·55 citations·filing 2004–2023
84Inventor score
Top patents by PatentIndex Score
18 records- 0189US10790119B2Plasma processing apparatus with post plasma gas injectionMATTSON TECH INC·Filed 2017·Granted Sep 29, 2020·5 cites·3 claims
- 0286US9184072B2Advanced multi-workpiece processing chamberDEVINE DANIEL J·Filed 2007·Granted Nov 10, 2015·16 cites·45 claims
- 0382US7276122B2Multi-workpiece processing chamberMATTSON TECH INC·Filed 2004·Granted Oct 2, 2007·25 cites·24 claims
- 0479US8066815B2Multi-workpiece processing chamberDEVINE DANIEL J·Filed 2007·Granted Nov 29, 2011·7 cites·13 claims
- 0575US11201036B2Plasma strip tool with uniformity controlMATTSON TECH INC·Filed 2018·Granted Dec 14, 2021·2 cites·13 claims
- 0670US12183558B2Workpiece processing apparatus with thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Granted Dec 31, 2024·0 cites·14 claims
- 0768US2021398775A1Plasma Strip Tool with Multiple Gas InjectionMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 0866US2023411125A1Temperature Control Using Temperature Control Element Coupled to Faraday ShieldBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2023·Application pending·0 cites
- 0962US2021257196A1Plasma Processing Apparatus and MethodsMATTSON TECH INC·Filed 2021·Application pending·0 cites
- 1059US11837447B2Workpiece processing apparatus with plasma and thermal processing systemsBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
- 1159US2021005431A1Plasma Processing Apparatus With Post Plasma Gas InjectionMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 1255US2018358204A1Plasma Strip Tool With Multiple Gas Injection ZonesMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 1354US2019198301A1Plasma Processing Apparatus and MethodsMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 1448US11749509B2Temperature control using temperature control element coupled to faraday shieldMATTSON TECH INC·Filed 2018·Granted Sep 5, 2023·0 cites·10 claims
- 1546US11195718B2Spacer open process by dual plasmaMATTSON TECH INC·Filed 2020·Granted Dec 7, 2021·0 cites·12 claims
- 1644US2020243305A1Post Plasma Gas Injection In A Separation GridMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 1741US2019131112A1Inductively Coupled Plasma Wafer Bevel Strip ApparatusMATTSON TECH INC·Filed 2018·Application pending·0 cites
- 1838US2018358206A1Plasma Processing ApparatusMATTSON TECH INC·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →