Inventor · disambiguated record
Naoto Nakashima
Also filed as: NAKASHIMA NAOTO
8 granted patents·228 citations·filing 1984–1989
89Inventor score
Files withHITACHI LTD8
Top patents by PatentIndex Score
8 records- 0194US4668089AExposure apparatus and method of aligning exposure mask with workpieceHITACHI LTD·Filed 1984·Granted May 26, 1987·85 cites·22 claims
- 0289US4819033AIllumination apparatus for exposureHITACHI LTD·Filed 1987·Granted Apr 4, 1989·55 cites·8 claims
- 0383US5008702AExposure method and apparatusHITACHI LTD·Filed 1989·Granted Apr 16, 1991·33 cites·46 claims
- 0471US4862008AMethod and apparatus for optical alignment of semiconductor by using a hologramHITACHI LTD·Filed 1988·Granted Aug 29, 1989·21 cites·40 claims
- 0558US4993837AMethod and apparatus for pattern detectionHITACHI LTD·Filed 1989·Granted Feb 19, 1991·12 cites·35 claims
- 0657US4701050ASemiconductor exposure apparatus and alignment method thereforHITACHI LTD·Filed 1985·Granted Oct 20, 1987·12 cites·12 claims
- 0748US4744666AAlignment detection optical system of projection type alignerHITACHI LTD·Filed 1986·Granted May 17, 1988·8 cites·5 claims
- 0829US4779986AReduction projection system alignment method and apparatusHITACHI LTD·Filed 1986·Granted Oct 25, 1988·2 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →