Inventor · disambiguated record
Yuko Kengoyama
Also filed as: KENGOYAMA YUKO
5 granted patents·1 citations·filing 2017–2022
62Inventor score
Technology areasH10P
Files withASM IP HOLDING BV5
Top patents by PatentIndex Score
5 records- 0181US11527400B2Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silaneASM IP HOLDING BV·Filed 2020·Granted Dec 13, 2022·1 cites·14 claims
- 0272US12033849B2Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silaneASM IP HOLDING BV·Filed 2022·Granted Jul 9, 2024·0 cites·15 claims
- 0355US12417911B2Method and system for forming silicon nitride layer using low radio frequency plasma processASM IP HOLDING BV·Filed 2022·Granted Sep 16, 2025·0 cites·20 claims
- 0444US10707073B2Film forming method and patterning methodASM IP HOLDING BV·Filed 2017·Granted Jul 7, 2020·0 cites·13 claims
- 0542US10770257B2Substrate processing methodASM IP HOLDING BV·Filed 2018·Granted Sep 8, 2020·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →