Inventor · disambiguated record
Andrey Sergeevich Tychkov
Also filed as: TYCHKOV ANDREY S · TYCHKOV ANDREY SERGEEVICH
5 granted patents·1 pending application·43 citations·filing 2006–2022
76Inventor score
Top patents by PatentIndex Score
6 records- 0194US7834980B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Granted Nov 16, 2010·31 cites·22 claims
- 0280US9360762B2Illumination system, lithographic apparatus and methodTYCHKOV ANDREY SERGEEVICH·Filed 2012·Granted Jun 7, 2016·8 cites·28 claims
- 0376US11237491B2Reflective optical element for a radiation beamASML NETHERLANDS BV·Filed 2019·Granted Feb 1, 2022·2 cites·16 claims
- 0472US10295916B2EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatusASML NETHERLANDS BV·Filed 2018·Granted May 21, 2019·2 cites·20 claims
- 0546US2025008634A1Optical system and method for a radiation sourceASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0636US12007693B2Laser focussing moduleASML NETHERLANDS BV·Filed 2020·Granted Jun 11, 2024·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →