Inventor · disambiguated record
Toru Momma
Also filed as: MOMMA TORU
12 granted patents·2 pending applications·8 citations·filing 2015–2020
82Inventor score
Files withSCREEN HOLDINGS CO LTD14
Top patents by PatentIndex Score
14 records- 0191US11203094B2Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Dec 21, 2021·3 cites·10 claims
- 0279US10920764B2Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Feb 16, 2021·3 cites·6 claims
- 0369US10651056B2Treating liquid vaporizing apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 12, 2020·1 cites·19 claims
- 0465US9972516B2Exposure device, substrate processing apparatus, exposure method for substrate and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 15, 2018·1 cites·11 claims
- 0547US2018071883A1Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2017·Application pending·0 cites
- 0645US10668591B2Substrate cleaning device, substrate processing apparatus and substrate cleaning methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jun 2, 2020·0 cites·8 claims
- 0745US10627836B2Pumping apparatus and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Apr 21, 2020·0 cites·15 claims
- 0840US10331049B2Substrate cleaning device and substrate processing apparatus including the sameSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jun 25, 2019·0 cites·7 claims
- 0938US11000783B2Pumping apparatus, treatment solution supplying device, and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted May 11, 2021·0 cites·4 claims
- 1038US10214814B2Substrate treating apparatus and treatment gas supplying nozzleSCREEN HOLDINGS CO LTD·Filed 2016·Granted Feb 26, 2019·0 cites·19 claims
- 1137US11404629B2Treating solution supply apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 2, 2022·0 cites·19 claims
- 1237US10236200B2Exposure device and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted Mar 19, 2019·0 cites·8 claims
- 1334US10629463B2Thermal processing apparatus and thermal processing methodSCREEN HOLDINGS CO LTD·Filed 2015·Granted Apr 21, 2020·0 cites·8 claims
- 1432US2017128962A1Nozzle standby device and substrate treating apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →