Inventor · disambiguated record
Jason Ferns
Also filed as: FERNS JASON
9 granted patents·107 citations·filing 2004–2023
87Inventor score
Top patents by PatentIndex Score
9 records- 0191US7221989B2Optical metrology model optimization for process controlTOKYO ELECTRON LTD·Filed 2006·Granted May 22, 2007·18 cites·27 claims
- 0291US7065423B2Optical metrology model optimization for process controlTIMBRE TECH INC·Filed 2004·Granted Jun 20, 2006·58 cites·35 claims
- 0388US8666703B2Method for automated determination of an optimally parameterized scatterometry modelFERNS JASON·Filed 2010·Granted Mar 4, 2014·12 cites·17 claims
- 0486US10692705B2Advanced optical sensor and method for detecting an optical event in a light emission signal in a plasma chamberTOKYO ELECTRON LTD·Filed 2016·Granted Jun 23, 2020·5 cites·23 claims
- 0582US10453653B2Endpoint detection algorithm for atomic layer etching (ALE)TOKYO ELECTRON LTD·Filed 2017·Granted Oct 22, 2019·3 cites·13 claims
- 0682US7395132B2Optical metrology model optimization for process controlTIMBRE TECH INC·Filed 2007·Granted Jul 1, 2008·11 cites·28 claims
- 0779US12276759B2LiDAR systems and methods for focusing on ranges of interestINNOVUSION INC·Filed 2023·Granted Apr 15, 2025·0 cites·14 claims
- 0874US11860313B2LiDAR systems and methods for focusing on ranges of interestINNOVUSION IRELAND LTD·Filed 2021·Granted Jan 2, 2024·0 cites·28 claims
- 0960US11675053B2LiDAR systems and methods for focusing on ranges of interestINNOVUSION IRELAND LTD·Filed 2019·Granted Jun 13, 2023·0 cites·21 claims
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