Inventor · disambiguated record
Patrick P. Naulleau
Also filed as: NAULLEAU PATRICK · NAULLEAU PATRICK P
20 granted patents·660 citations·filing 1998–2003
96Inventor score
Top patents by PatentIndex Score
20 records- 0195US6573997B1Hybrid shearing and phase-shifting point diffraction interferometerCALIFORNIA·Filed 2000·Granted Jun 3, 2003·106 cites·20 claims
- 0295US6233056B1Interferometric at-wavelength flare characterization of EUV optical systemsUNIV CALIFORNIA·Filed 2000·Granted May 15, 2001·70 cites·33 claims
- 0394US6392792B1Method of fabricating reflection-mode EUV diffraction elementsUNIV CALIFORNIA·Filed 2000·Granted May 21, 2002·73 cites·34 claims
- 0489US6118535AIn Situ alignment system for phase-shifting point-diffraction interferometryFiled 1999·Granted Sep 12, 2000·78 cites·36 claims
- 0586US6100978ADual-domain point diffraction interferometerFiled 1999·Granted Aug 8, 2000·56 cites·35 claims
- 0685US6738135B1System for inspecting EUV lithography masksFiled 2002·Granted May 18, 2004·38 cites·10 claims
- 0781US6111646ANull test fourier domain alignment technique for phase-shifting point diffraction interferometerFiled 1999·Granted Aug 29, 2000·48 cites·41 claims
- 0879US6266147B1Phase-shifting point diffraction interferometer phase grating designsUNIV CALIFORNIA·Filed 1999·Granted Jul 24, 2001·45 cites·27 claims
- 0976US6798494B2Apparatus for generating partially coherent radiationEUV LLC·Filed 2001·Granted Sep 28, 2004·15 cites·33 claims
- 1074US6768567B2Synchrotron-based EUV lithography illuminator simulatorEUV LLC·Filed 2002·Granted Jul 27, 2004·13 cites·29 claims
- 1173US6327102B1Miniature self-contained vacuum compatible electronic imaging microscopeUNIV CALIFORNIA·Filed 2000·Granted Dec 4, 2001·18 cites·13 claims
- 1272US6707560B1Dual-domain lateral shearing interferometerUNIV CALIFORNIA·Filed 2000·Granted Mar 16, 2004·12 cites·24 claims
- 1370US6927887B2Holographic illuminator for synchrotron-based projection lithography systemsEUV LLC·Filed 2001·Granted Aug 9, 2005·11 cites·30 claims
- 1469US6559952B1System for interferometric distortion measurements that define an optical pathUNIV CALIFORNIA·Filed 2000·Granted May 6, 2003·16 cites·23 claims
- 1568US7016030B2Extended surface parallel coating inspection methodEUV LLC·Filed 2003·Granted Mar 21, 2006·7 cites·43 claims
- 1666US6859263B2Apparatus for generating partially coherent radiationEUV LLC·Filed 2003·Granted Feb 22, 2005·8 cites·23 claims
- 1765US6861273B2Method of fabricating reflection-mode EUV diffusersEUV LLC·Filed 2001·Granted Mar 1, 2005·11 cites·66 claims
- 1863US7027226B2Diffractive optical element for extreme ultraviolet wavefront controlEUV LLC·Filed 2001·Granted Apr 11, 2006·7 cites·19 claims
- 1957US6151115APhase-shifting point diffraction interferometer focus-aid enhanced maskFiled 1999·Granted Nov 21, 2000·17 cites·30 claims
- 2041US6195169B1Phase-shifting point diffraction interferometer grating designsUNIV CALIFORNIA·Filed 1998·Granted Feb 27, 2001·11 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →