Inventor · disambiguated record
Satoru Fushimi
Also filed as: FUSHIMI SATORU
8 granted patents·350 citations·filing 1982–2017
89Inventor score
Top patents by PatentIndex Score
8 records- 0193US5051585AApparatus and method of pattern detection based on a scanning transmission electron microscopeHITACHI LTD·Filed 1989·Granted Sep 24, 1991·73 cites·23 claims
- 0289US4791586AMethod of and apparatus for checking geometry of multi-layer patterns for IC structuresHITACHI LTD·Filed 1985·Granted Dec 13, 1988·99 cites·30 claims
- 0387US4508453APattern detection systemHITACHI LTD·Filed 1982·Granted Apr 2, 1985·48 cites·11 claims
- 0485US4990776AElectron microscopeHITACHI LTD·Filed 1988·Granted Feb 5, 1991·47 cites·6 claims
- 0574US4814615AMethod and apparatus for detecting defect in circuit pattern of a mask for X-ray exposureHITACHI LTD·Filed 1987·Granted Mar 21, 1989·31 cites·15 claims
- 0669US4614430AMethod of detecting pattern defect and its apparatusHITACHI LTD·Filed 1984·Granted Sep 30, 1986·40 cites·7 claims
- 0749US10833477B2Drive unit and light-emitting deviceSONY SEMICONDUCTOR SOLUTIONS CORP·Filed 2017·Granted Nov 10, 2020·0 cites·2 claims
- 0840US5157735AChipping detection system and methodHITACHI LTD·Filed 1989·Granted Oct 20, 1992·12 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →