Inventor · disambiguated record
Shoju Vayyapron
Also filed as: VAYYAPRON SHOJU
4 granted patents·2 pending applications·10 citations·filing 2014–2019
68Inventor score
Files withAPPLIED MATERIALS INC6
Top patents by PatentIndex Score
6 records- 0190US11053590B2Nozzle for uniform plasma processingAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·3 cites·10 claims
- 0287US10465288B2Nozzle for uniform plasma processingAPPLIED MATERIALS INC·Filed 2014·Granted Nov 5, 2019·4 cites·10 claims
- 0379US10325790B2Methods and apparatus for correcting substrate deformityAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·3 cites·20 claims
- 0440US10777442B2Hybrid substrate carrierAPPLIED MATERIALS INC·Filed 2017·Granted Sep 15, 2020·0 cites·19 claims
- 0536US2019259647A1Deposition ring for processing reduced size substratesAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 0636US2019259635A1Process kit for processing reduced sized substratesAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →