Inventor · disambiguated record
Toshio Yumiyama
Also filed as: YUMIYAMA TOSHIO
9 granted patents·36 citations·filing 2008–2022
84Inventor score
Files withNINOMIYA SHIRO2SEN CORP2SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD2SEN CORP AN SHI & AXCELIS CO1SUMITOMO HEAVY IND ION TECH CO LTD1
Top patents by PatentIndex Score
9 records- 0187US8692216B2Ion implantation apparatus and control method thereofSEN CORP·Filed 2013·Granted Apr 8, 2014·11 cites·34 claims
- 0282US8772741B2Ion implantation method and ion implantation apparatusNINOMIYA SHIRO·Filed 2012·Granted Jul 8, 2014·7 cites·15 claims
- 0381US10217607B2Ion implantation apparatus and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2017·Granted Feb 26, 2019·3 cites·19 claims
- 0480US7851772B2Ion implantation apparatus and ion implantation methodSEN CORP AN SHI & AXCELIS CO·Filed 2008·Granted Dec 14, 2010·6 cites·10 claims
- 0579US9305784B2Ion implantation method and ion implantation apparatusSEN CORP·Filed 2013·Granted Apr 5, 2016·5 cites·15 claims
- 0672US8735855B2Ion beam irradiation system and ion beam irradiation methodNINOMIYA SHIRO·Filed 2011·Granted May 27, 2014·3 cites·7 claims
- 0760US9379030B2Ion implantation method and ion implantation apparatusSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2013·Granted Jun 28, 2016·1 cites·20 claims
- 0856US12469677B2Ion implantation method, ion implanter, and method for manufacturing semiconductor deviceSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Nov 11, 2025·0 cites·24 claims
- 0931US9564289B2Ion implanter and method of controlling the sameSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Feb 7, 2017·0 cites·18 claims
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