Assignee
NINOMIYA SHIRO
JP·4 granted patents·23 citations·filing 2011–2012
Top patents by PatentIndex Score
4 records- 0185US9601314B2Ion implantation apparatus and ion implantation methodNINOMIYA SHIRO·Filed 2012·Granted Mar 21, 2017·7 cites·14 claims
- 0283US8772142B2Ion implantation method and ion implantation apparatusNINOMIYA SHIRO·Filed 2012·Granted Jul 8, 2014·6 cites·16 claims
- 0382US8772741B2Ion implantation method and ion implantation apparatusNINOMIYA SHIRO·Filed 2012·Granted Jul 8, 2014·7 cites·15 claims
- 0472US8735855B2Ion beam irradiation system and ion beam irradiation methodNINOMIYA SHIRO·Filed 2011·Granted May 27, 2014·3 cites·7 claims
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