Inventor · disambiguated record
Sung-Hyuck Kim
Also filed as: KIM SUNG-HYUCK
5 granted patents·4 pending applications·5 citations·filing 2004–2012
65Inventor score
Top patents by PatentIndex Score
9 records- 0149US7432022B2Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Oct 7, 2008·4 cites·13 claims
- 0243US7335449B2Masks each having a central main pattern region and a peripheral phantom pattern region with light-transmitting features in both pattern regions having the shame shape and pitch and methods of manufacturing the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Feb 26, 2008·1 cites·12 claims
- 0339US7595136B2Method of fabricating chrome-less phase shift maskSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Sep 29, 2009·0 cites·21 claims
- 0438US8795929B2Pellicle having buffer zone and photomask structure having pellicleKIM SUNG-HYUCK·Filed 2012·Granted Aug 5, 2014·0 cites·17 claims
- 0538US2008090157A1Photo mask with improved contrast and method of fabricating the sameSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 0636US2005123845A1Method of adjusting deviation of critical dimension of patternsFiled 2005·Application pending·0 cites
- 0730US2006019176A1Chromeless phase shift mask and method of fabricating the sameKIM SUNG-HYUCK·Filed 2005·Application pending·0 cites
- 0826US2010209826A1Apparatus for processing photomask, methods of using the same, and methods of processing photomaskKIM SUNG-HYUCK·Filed 2010·Application pending·0 cites
- 0922US8304173B2Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor deviceYU SANG-YONG·Filed 2010·Granted Nov 6, 2012·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →