Inventor · disambiguated record
James Greeneich
Also filed as: GREENEICH JAMES S · GREENEICH JAMES SHERWOOD
4 granted patents·1 pending application·61 citations·filing 1979–2007
75Inventor score
Top patents by PatentIndex Score
5 records- 0190US4264711AMethod of compensating for proximity effects in electron-beam lithographyBURROUGHS CORP·Filed 1979·Granted Apr 28, 1981·44 cites·17 claims
- 0288US7548302B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Jun 16, 2009·12 cites·45 claims
- 0368US8264667B2Lithographic apparatus and device manufacturing method using interferometric and other exposureTROOST KARS ZEGER·Filed 2006·Granted Sep 11, 2012·3 cites·34 claims
- 0466US7317506B2Variable illumination sourceASML NETHERLANDS BV·Filed 2005·Granted Jan 8, 2008·2 cites·20 claims
- 0540US2007153249A1Lithographic apparatus and device manufacturing method using multiple exposures and multiple exposure typesASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →