Inventor · disambiguated record
Vladimir Galburt
Also filed as: GALBURT VLADIMIR
9 granted patents·4 pending applications·80 citations·filing 2001–2024
87Inventor score
Top patents by PatentIndex Score
13 records- 0194US7229504B2Methods and apparatus for determining scrubber brush pressureAPPLIED MATERIALS INC·Filed 2005·Granted Jun 12, 2007·25 cites·15 claims
- 0289US7507296B2Methods and apparatus for determining scrubber brush pressureAPPLIED MATERIALS INC·Filed 2007·Granted Mar 24, 2009·12 cites·8 claims
- 0386US9337014B1Processing system architecture with single load lock chamberALTA DEVICES INC·Filed 2013·Granted May 10, 2016·8 cites·6 claims
- 0484US7655565B2Electroprocessing profile controlAPPLIED MATERIALS INC·Filed 2005·Granted Feb 2, 2010·8 cites·32 claims
- 0584US6986185B2Methods and apparatus for determining scrubber brush pressureAPPLIED MATERIALS INC·Filed 2002·Granted Jan 17, 2006·25 cites·37 claims
- 0683US2023405758A1Polishing carrier head with multiple zonesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0776US12251788B2Polishing head with local wafer pressureAPPLIED MATERIALS INC·Filed 2024·Granted Mar 18, 2025·0 cites·20 claims
- 0875US11780049B2Polishing carrier head with multiple angular pressurizable zonesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·0 cites·19 claims
- 0971US2025269488A1Electrical connection for chemical mechanical polishing carrier headAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1068US7709382B2Electroprocessing profile controlAPPLIED MATERIALS INC·Filed 2007·Granted May 4, 2010·2 cites·11 claims
- 1165US11986923B2Polishing head with local wafer pressureAPPLIED MATERIALS INC·Filed 2021·Granted May 21, 2024·0 cites·11 claims
- 1243US2005077188A1Endpoint for electrochemical processingAPPLIED MATERIALS INC·Filed 2004·Application pending·0 cites
- 1335US2002117188A1Wafer presence sensor for detecting quartz wafersFiled 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →