Inventor · disambiguated record
Sangita Kumari
Also filed as: KUMARI SANGITA
6 granted patents·1 citations·filing 2022–2022
65Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0187US12100598B2Methods for planarizing a substrate using a combined wet etch and chemical mechanical polishing (CMP) processTOKYO ELECTRON LTD·Filed 2022·Granted Sep 24, 2024·1 cites·21 claims
- 0259US12148624B2Wet etch process and method to control fin height and channel area in a fin field effect transistor (FinFET)TOKYO ELECTRON LTD·Filed 2022·Granted Nov 19, 2024·0 cites·20 claims
- 0358US12243749B2Methods to provide uniform wet etching of material within high aspect ratio features provided on a patterned substrateTOKYO ELECTRON LTD·Filed 2022·Granted Mar 4, 2025·0 cites·20 claims
- 0458US12100599B2Wet etch process and method to provide uniform etching of material formed within features having different critical dimension (CD)TOKYO ELECTRON LTD·Filed 2022·Granted Sep 24, 2024·0 cites·20 claims
- 0557US12148625B2Methods to prevent surface charge induced cd-dependent etching of material formed within features on a patterned substrateTOKYO ELECTRON LTD·Filed 2022·Granted Nov 19, 2024·0 cites·22 claims
- 0655US12482702B2Wet etch process and methods to form air gaps between metal interconnectsTOKYO ELECTRON LTD·Filed 2022·Granted Nov 25, 2025·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →