Inventor · disambiguated record
Pay-Yau Huang
Also filed as: HUANG PAY-YAU
1 granted patent·1 pending application·0 citations·filing 2005–2010
7Inventor score
Files withNAT UNIV CHUNG CHENG2
Top patents by PatentIndex Score
2 records- 0133US7169019B2Method of monitoring surface status and life of pad by detecting temperature of polishing interface during chemical mechanical processNAT UNIV CHUNG CHENG·Filed 2005·Granted Jan 30, 2007·0 cites·8 claims
- 0233US2011136407A1Method for predicting the polishing characteristics and life-span of a soft polishing padNAT UNIV CHUNG CHENG·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →