Inventor · disambiguated record
Ted Liang
Also filed as: LIANG TED
4 granted patents·5 pending applications·94 citations·filing 2001–2007
80Inventor score
Top patents by PatentIndex Score
9 records- 0188US6720118B2Enhanced inspection of extreme ultraviolet maskINTEL CORP·Filed 2003·Granted Apr 13, 2004·29 cites·18 claims
- 0285US6897157B2Method of repairing an opaque defect on a mask with electron beam-induced chemical etchingINTEL CORP·Filed 2003·Granted May 24, 2005·35 cites·5 claims
- 0384US6583068B2Enhanced inspection of extreme ultraviolet maskINTEL CORP·Filed 2001·Granted Jun 24, 2003·23 cites·10 claims
- 0466US6774990B2Method to inspect patterns with high resolution photoemissionINTEL CORP·Filed 2002·Granted Aug 10, 2004·7 cites·85 claims
- 0547US2008153305A1Passivating metal etch structuresLIANG TED·Filed 2007·Application pending·0 cites
- 0640US2005109278A1Method to locally protect extreme ultraviolet multilayer blanks used for lithographyFiled 2003·Application pending·0 cites
- 0739US2006134920A1Passivating metal etch structuresLIANG TED·Filed 2004·Application pending·0 cites
- 0836US2003000921A1Mask repair with electron beam-induced chemical etchingFiled 2001·Application pending·0 cites
- 0935US2006147814A1Methods for repairing an alternating phase-shift maskLIANG TED·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →