Inventor · disambiguated record
Minobu Matsunaga
Also filed as: MATSUNAGA MINOBU
19 granted patents·772 citations·filing 1994–2003
96Inventor score
Top patents by PatentIndex Score
19 records- 0192US5984540ADeveloping apparatus and developing methodDAINIPPON SCREEN MFG·Filed 1997·Granted Nov 16, 1999·27 cites·28 claims
- 0291US6558053B2Substrate processing apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted May 6, 2003·63 cites·39 claims
- 0388US5963753ASubstrate processing apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Oct 5, 1999·103 cites·21 claims
- 0487US6832863B2Substrate treating apparatus and methodDAINIPPON SCREEN MFG·Filed 2003·Granted Dec 21, 2004·41 cites·52 claims
- 0583US6827782B2Chemical treating apparatusDAINIPPON SCREEN MFG·Filed 2003·Granted Dec 7, 2004·30 cites·20 claims
- 0683US6080969AApparatus for and method of thermally processing substrateSMC CORP·Filed 1998·Granted Jun 27, 2000·70 cites·6 claims
- 0780US6099643AApparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment sectionDAINIPPON SCREEN MFG·Filed 1997·Granted Aug 8, 2000·61 cites·12 claims
- 0879US6869234B2Developing apparatus and developing methodDAINIPPON SCREEN MFG·Filed 2003·Granted Mar 22, 2005·23 cites·16 claims
- 0979US5927077AProcessing system hot plate construction substrateDAINIPPON SCREEN MFG·Filed 1997·Granted Jul 27, 1999·58 cites·10 claims
- 1076US5411076ASubstrate cooling device and substrate heat-treating apparatusDAINIPPON SCREEN MFG CO LTD CO·Filed 1994·Granted May 2, 1995·68 cites·8 claims
- 1175US6656277B2Apparatus for and method of processing substrateDAINIPPON SCREEN MFG·Filed 2002·Granted Dec 2, 2003·18 cites·7 claims
- 1275US5857474AMethod of and apparatus for washing a substrateDAINIPPON SCREEN MFG·Filed 1996·Granted Jan 12, 1999·45 cites·20 claims
- 1370US5638687ASubstrate cooling method and apparatusDAINIPPON SCREEN MFG·Filed 1995·Granted Jun 17, 1997·40 cites·19 claims
- 1470US5522215ASubstrate cooling apparatusDAINIPPON SCREEN MFG·Filed 1994·Granted Jun 4, 1996·41 cites·8 claims
- 1569US6752544B2Developing apparatus and developing methodDAINIPPON SCREEN MFG·Filed 2002·Granted Jun 22, 2004·12 cites·29 claims
- 1668US6440218B1Coating solution applying method and apparatusDAINIPPON SCREEN MFG·Filed 1999·Granted Aug 27, 2002·38 cites·4 claims
- 1761US5976620ACoating solution applying method and apparatusDAINIPPON SCREEN MFG·Filed 1997·Granted Nov 2, 1999·26 cites·16 claims
- 1855US7105074B2Substrate treating method and apparatusDAINIPPON SCREEN MFG·Filed 2002·Granted Sep 12, 2006·5 cites·31 claims
- 1933US5865893ASpin coating apparatusDAINIPPON SCREEN MFG·Filed 1995·Granted Feb 2, 1999·3 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →