Inventor · disambiguated record
Peter B. Mumola
Also filed as: MUMOLA PETER B
11 granted patents·1,632 citations·filing 1980–2001
93Inventor score
Files withHUGHES AIRCRAFT CO6PERKIN ELMER CORP2INTEGRATED PROCESS EQUIPMENT C1PLASMA SIL LLC1ZYGO CORP1
Top patents by PatentIndex Score
11 records- 0198US5229872AExposure device including an electrically aligned electronic mask for micropatterningHUGHES AIRCRAFT CO·Filed 1992·Granted Jul 20, 1993·1.3k cites·24 claims
- 0289US5543919AApparatus and method for performing high spatial resolution thin film layer thickness metrologyINTEGRATED PROCESS EQUIPMENT C·Filed 1994·Granted Aug 6, 1996·71 cites·20 claims
- 0385US5337150AApparatus and method for performing thin film layer thickness metrology using a correlation reflectometerHUGHES AIRCRAFT CO·Filed 1992·Granted Aug 9, 1994·57 cites·18 claims
- 0481US5292400AMethod and apparatus for producing variable spatial frequency control in plasma assisted chemical etchingHUGHES AIRCRAFT CO·Filed 1992·Granted Mar 8, 1994·38 cites·17 claims
- 0565US4422046AAxisymmetric spatial/temporal encoderPERKIN ELMER CORP·Filed 1980·Granted Dec 20, 1983·18 cites·19 claims
- 0663US5419803AMethod of planarizing microstructuresHUGHES AIRCRAFT CO·Filed 1993·Granted May 30, 1995·35 cites·9 claims
- 0760US5474647AWafer flow architecture for production wafer processingHUGHES AIRCRAFT CO·Filed 1993·Granted Dec 12, 1995·35 cites·29 claims
- 0854US6074947AProcess for improving uniform thickness of semiconductor substrates using plasma assisted chemical etchingPLASMA SIL LLC·Filed 1998·Granted Jun 13, 2000·22 cites·11 claims
- 0945US5365031AApparatus and method for shielding a workpiece holding mechanism from depreciative effects during workpiece processingHUGHES AIRCRAFT CO·Filed 1992·Granted Nov 15, 1994·15 cites·24 claims
- 1043US6646779B2Strain-isolated stage mirrorZYGO CORP·Filed 2001·Granted Nov 11, 2003·1 cites·23 claims
- 1136US4516062AActuatorPERKIN ELMER CORP·Filed 1983·Granted May 7, 1985·5 cites·14 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →