Inventor · disambiguated record
Tracy A. Gast
Also filed as: GAST TRACY · GAST TRACY A
13 granted patents·4 pending applications·77 citations·filing 2002–2020
90Inventor score
Top patents by PatentIndex Score
17 records- 0192US8387635B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsCOLLINS JIMMY D·Filed 2007·Granted Mar 5, 2013·18 cites·18 claims
- 0291US8235062B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2009·Granted Aug 7, 2012·18 cites·17 claims
- 0387US7913706B2Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatusesFSI INT INC·Filed 2008·Granted Mar 29, 2011·14 cites·10 claims
- 0480US9666456B2Method and apparatus for treating a workpiece with arrays of nozzlesTEL FSI INC·Filed 2015·Granted May 30, 2017·2 cites·11 claims
- 0579US8684015B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2012·Granted Apr 1, 2014·4 cites·9 claims
- 0669US8070884B2Methods for rinsing microelectronic substrates utilizing cool rinse fluid within a gas enviroment including a drying enhancement substanceGAST TRACY A·Filed 2005·Granted Dec 6, 2011·5 cites·18 claims
- 0764US7244315B2Microelectronic device drying devices and techniquesFSI INT INC·Filed 2003·Granted Jul 17, 2007·9 cites·9 claims
- 0860US12411075B2Optical sensor window cleanerENTEGRIS INC·Filed 2020·Granted Sep 9, 2025·0 cites·18 claims
- 0959US6845779B2Edge gripping device for handling a set of semiconductor wafers in an immersion processing systemFSI INT INC·Filed 2002·Granted Jan 25, 2005·7 cites·26 claims
- 1056US8967167B2Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluidsFSI INT INC·Filed 2012·Granted Mar 3, 2015·0 cites·10 claims
- 1156US8668778B2Method of removing liquid from a barrier structureFSI INT INC·Filed 2012·Granted Mar 11, 2014·0 cites·13 claims
- 1255US9039840B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationTEL FSI INC·Filed 2013·Granted May 26, 2015·0 cites·5 claims
- 1355US8978675B2Method and apparatus for treating a workpiece with arrays of nozzlesFSI INT INC·Filed 2012·Granted Mar 17, 2015·0 cites·9 claims
- 1451US2008006303A1Liquid aersol particle removal methodBUTTERBAUGH JEFFERY W·Filed 2007·Application pending·0 cites
- 1546US2011180114A1Liquid aerosol particle removal methodBUTTERBAUGH JEFFERY W·Filed 2011·Application pending·0 cites
- 1644US2007246080A1Microelectronic device drying devices and techniquesGAST TRACY A·Filed 2007·Application pending·0 cites
- 1734US2005000549A1Wafer processing using gaseous antistatic agent during drying phase to control charge build-upFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →