Inventor · disambiguated record
Katsufumi Matsuki
Also filed as: MATSUKI KATSUFUMI
2 granted patents·4 pending applications·5 citations·filing 2012–2022
42Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0184US10037901B2Substrate liquid treatment apparatus, method of cleaning substrate liquid treatment apparatus and non-transitory storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Jul 31, 2018·5 cites·8 claims
- 0250US2025125162A1Substrate processing method and substrate processingsystemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0349US2024290607A1Substrate processing method, substrate processing system and computer-readable recording mediumTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0447US2024355647A1Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0543US2014373877A1Liquid processing apparatus and liquid processing methodTOKYO ELECTRON LTD·Filed 2014·Application pending·0 cites
- 0642US9321085B2Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Apr 26, 2016·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →