Inventor · disambiguated record
David R. Burgin
Also filed as: BURGIN DAVID R · BURGIN DAVID RICHARD
9 granted patents·1 pending application·395 citations·filing 1990–2003
91Inventor score
Files withAPPLIED MATERIALS INC9
Top patents by PatentIndex Score
10 records- 0194US5886355AIon implantation apparatus having increased source lifetimeAPPLIED MATERIALS INC·Filed 1996·Granted Mar 23, 1999·101 cites·6 claims
- 0293US5262652AIon implantation apparatus having increased source lifetimeAPPLIED MATERIALS INC·Filed 1992·Granted Nov 16, 1993·71 cites·28 claims
- 0388US5554852AIon implantation having increased source lifetimeAPPLIED MATERIALS INC·Filed 1995·Granted Sep 10, 1996·45 cites·15 claims
- 0487US5920076AIon beam apparatusAPPLIED MATERIALS INC·Filed 1996·Granted Jul 6, 1999·77 cites·16 claims
- 0586US5517077AIon implantation having increased source lifetimeAPPLIED MATERIALS INC·Filed 1993·Granted May 14, 1996·38 cites·17 claims
- 0675US5130552AImproved ion implantation using a variable mass resolving systemAPPLIED MATERIALS INC·Filed 1990·Granted Jul 14, 1992·33 cites·9 claims
- 0757US6897457B1Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatusAPPLIED MATERIALS INC·Filed 1999·Granted May 24, 2005·14 cites·13 claims
- 0855US7004234B2Vaporizer for generating feed gas for an arc chamberAPPLIED MATERIALS INC·Filed 2003·Granted Feb 28, 2006·4 cites·1 claims
- 0954US6093456ABeam stop apparatus for an ion implanterAPPLIED MATERIALS INC·Filed 1995·Granted Jul 25, 2000·12 cites·25 claims
- 1037US2001054384A1Vaporiser for generating feed gas for an arc chamberFiled 2001·Application pending·0 cites
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