Inventor · disambiguated record
Thomas Stammler
Also filed as: STAMMLER THOMAS
9 granted patents·3 pending applications·57 citations·filing 2002–2017
87Inventor score
Top patents by PatentIndex Score
12 records- 0187US6678240B2Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elementsZEISS CARL SMT AG·Filed 2002·Granted Jan 13, 2004·27 cites·20 claims
- 0284US9280060B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2014·Granted Mar 8, 2016·5 cites·28 claims
- 0384US7301622B2Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elementsZEISS CARL SMT AG·Filed 2005·Granted Nov 27, 2007·6 cites·18 claims
- 0478US8873023B2Illumination system for microlithographySCHOLZ AXEL·Filed 2011·Granted Oct 28, 2014·4 cites·12 claims
- 0576US6934011B2Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elementsZEISS CARL SMT AG·Filed 2003·Granted Aug 23, 2005·11 cites·10 claims
- 0670US9606441B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2016·Granted Mar 28, 2017·1 cites·20 claims
- 0767US7605914B2Optical system and method for improving imaging properties thereofZEISS CARL SMT AG·Filed 2009·Granted Oct 20, 2009·2 cites·41 claims
- 0866US10151929B2Illumination optical unit for projection lithography and hollow waveguide component thereforZEISS CARL SMT GMBH·Filed 2016·Granted Dec 11, 2018·1 cites·23 claims
- 0957US10088754B2Illumination system for microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Oct 2, 2018·0 cites·19 claims
- 1046US2010079738A1Optical measurement apparatus for a projection exposure systemZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 1145US2008068599A1Method for optimizing the image properties of at least two optical elements as well as methods for optimizing the image properties of at least three optical elementsZEISS CARL SMT AG·Filed 2007·Application pending·0 cites
- 1238US2007071303A1Optical system and method for improving imaging properties thereofSTAMMLER THOMAS·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →