Inventor · disambiguated record
Yosuke Shirata
Also filed as: SHIRATA YOSUKE
7 granted patents·45 citations·filing 1996–2012
80Inventor score
Top patents by PatentIndex Score
7 records- 0174US6882403B1Lithography system and methodNIKON CORP·Filed 2000·Granted Apr 19, 2005·16 cites·29 claims
- 0265US8243254B2Exposing method, exposure apparatus, and device fabricating methodSHIRATA YOSUKE·Filed 2008·Granted Aug 14, 2012·2 cites·53 claims
- 0364US9025126B2Exposure apparatus adjusting method, exposure apparatus, and device fabricating methodSHIRATA YOSUKE·Filed 2008·Granted May 5, 2015·2 cites·34 claims
- 0457US6002487AAlignment method for performing alignment between shot areas on a waferNIKON CORP·Filed 1996·Granted Dec 14, 1999·25 cites·44 claims
- 0551US8547520B2Exposing method, exposure apparatus, and device fabricating methodSHIRATA YOSUKE·Filed 2012·Granted Oct 1, 2013·0 cites·51 claims
- 0649US8654306B2Exposure apparatus, cleaning method, and device fabricating methodSHIRAISHI KENICHI·Filed 2009·Granted Feb 18, 2014·0 cites·38 claims
- 0742US7876452B2Interferometric position-measuring devices and methodsNIKON CORP·Filed 2008·Granted Jan 25, 2011·0 cites·39 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →