Inventor · disambiguated record
Chi-Fu Yu
Also filed as: YU CHI-FU
5 granted patents·1 pending application·14 citations·filing 1997–2013
71Inventor score
Top patents by PatentIndex Score
6 records- 0143US6767407B2Auto-centering device for mechanical clampTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 27, 2004·3 cites·10 claims
- 0239US6787781B1Arc chamber filament for ion implanterTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Sep 7, 2004·1 cites·20 claims
- 0339US6737663B2Apparatus and method for detecting tilt angle of a wafer platformTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 18, 2004·1 cites·20 claims
- 0439US2015187616A1Mechanisms of adjustable laser beam for laser spike annealingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Application pending·0 cites
- 0537US9781994B2Wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted Oct 10, 2017·0 cites·20 claims
- 0636US5907895AWafer tweezer assembling deviceTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jun 1, 1999·9 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →