Inventor · disambiguated record
Patrick Leahey
Also filed as: LEAHEY PATRICK · LEAHEY PATRICK L
6 granted patents·3 pending applications·1,244 citations·filing 1997–2018
88Inventor score
Top patents by PatentIndex Score
9 records- 0198US6379575B1Treatment of etching chambers using activated cleaning gasAPPLIED MATERIALS INC·Filed 1997·Granted Apr 30, 2002·375 cites·47 claims
- 0296US6447636B1Plasma reactor with dynamic RF inductive and capacitive coupling controlAPPLIED MATERIALS INC·Filed 2000·Granted Sep 10, 2002·215 cites·43 claims
- 0396US6367410B1Closed-loop dome thermal control apparatus for a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Apr 9, 2002·620 cites·29 claims
- 0491US9914994B2System architecture for combined static and pass-by processingINTEVAC INC·Filed 2012·Granted Mar 13, 2018·14 cites·15 claims
- 0584US6598615B1Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamberAPPLIED MATERIALS INC·Filed 2000·Granted Jul 29, 2003·20 cites·13 claims
- 0667US10752987B2System architecture for combined static and pass-by processingINTEVAC INC·Filed 2018·Granted Aug 25, 2020·0 cites·14 claims
- 0744US2007079936A1Bonded multi-layer RF windowAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 0838US2011303148A1Full-enclosure, controlled-flow mini-environment for thin film chambersXIE JUN·Filed 2011·Application pending·0 cites
- 0934US2002100557A1ICP window heater integrated with faraday shield or floating electrode between the source power coil and the ICP windowAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →