Inventor · disambiguated record
Paul A. Swanson
Also filed as: SWANSON PAUL A
6 granted patents·3 pending applications·284 citations·filing 1991–2006
87Inventor score
Top patents by PatentIndex Score
9 records- 0194US5298939AMethod and apparatus for transfer of a reticle pattern onto a substrate by scanningSWANSON PAUL A·Filed 1991·Granted Mar 29, 1994·137 cites·16 claims
- 0288US6931938B2Measuring pressure exerted by a rigid surfaceFiled 2002·Granted Aug 23, 2005·40 cites·20 claims
- 0387US6885116B2Moving coil linear motor positioning stage with a concentric apertureFiled 2002·Granted Apr 26, 2005·40 cites·4 claims
- 0474US5883703AMethods and apparatus for detecting and compensating for focus errors in a photolithography toolMEGAPANEL CORP·Filed 1996·Granted Mar 16, 1999·41 cites·40 claims
- 0570US7364145B2High stiffness flexureEQUIPMENT SOLUTIONS INC·Filed 2006·Granted Apr 29, 2008·7 cites·17 claims
- 0658US6031597AMethod and apparatus for transfer of a reticle pattern onto a substrate by scanningFiled 1997·Granted Feb 29, 2000·19 cites·17 claims
- 0736US2003197117A1Method and apparatus for compensating a vector command to a galvanometer with light beam pointing error informationFiled 2002·Application pending·0 cites
- 0833US2003195643A1Method and apparatus for acceleration limiting a position command for motion controlFiled 2002·Application pending·0 cites
- 0933US2004046523A1Method and apparatus for storing and using motor parameters in a servo control system for tuningFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →