Inventor · disambiguated record
William J. Devore
Also filed as: DEVORE WILLIAM · DEVORE WILLIAM J
18 granted patents·282 citations·filing 1982–2008
94Inventor score
Technology areasH01J
Top patents by PatentIndex Score
18 records- 0188US5876902ARaster shaped beam writing strategy system and method for pattern generationETEC SYSTEMS INC·Filed 1997·Granted Mar 2, 1999·72 cites·7 claims
- 0287US4469948AComposite concentric-gap magnetic lensPERKIN ELMER CORP·Filed 1982·Granted Sep 4, 1984·28 cites·9 claims
- 0385US7372195B2Electron beam source having an extraction electrode provided with a magnetic disk elementAPPLIED MATERIALS INC·Filed 2005·Granted May 13, 2008·9 cites·22 claims
- 0485US6392333B1Electron gun having magnetic collimatorAPPLIED MATERIALS INC·Filed 1999·Granted May 21, 2002·44 cites·22 claims
- 0585US6274290B1Raster scan gaussian beam writing strategy and method for pattern generationETEC SYSTEMS INC·Filed 1998·Granted Aug 14, 2001·43 cites·9 claims
- 0683US7427765B2Electron beam column for writing shaped electron beamsJEOL LTD·Filed 2005·Granted Sep 23, 2008·6 cites·18 claims
- 0779US7800075B2Multi-function module for an electron beam columnBULLER BENYAMIN·Filed 2008·Granted Sep 21, 2010·4 cites·12 claims
- 0874US7227155B2Electrostatic deflection system with impedance matching for high positioning accuracyAPPLIED MATERIALS INC·Filed 2005·Granted Jun 5, 2007·3 cites·20 claims
- 0974US5729022AComposite concentric-gap magnetic lens and deflector with conical pole piecesETEC SYSTEMS INC·Filed 1996·Granted Mar 17, 1998·23 cites·16 claims
- 1070US7514682B2Electron anti-fogging baffle used as a detectorAPPLIED MATERIALS INC·Filed 2006·Granted Apr 7, 2009·2 cites·20 claims
- 1170US6521896B1Blanker assembly employing dielectric materialAPPLIED MATERIALS INC·Filed 2000·Granted Feb 18, 2003·9 cites·8 claims
- 1262US6768117B1Immersion lens with magnetic shield for charged particle beam systemAPPLIED MATERIALS INC·Filed 2000·Granted Jul 27, 2004·4 cites·8 claims
- 1360US6002135AMagnetic lens and deflector with inner and outer pole pieces with conical inner pole pieceETEC SYSTEMS INC·Filed 1998·Granted Dec 14, 1999·12 cites·19 claims
- 1459US6924494B2Method of exposing a target to a charged particle beamAPPLIED MATERIALS INC·Filed 2004·Granted Aug 2, 2005·3 cites·30 claims
- 1559US5376505ADevice fabrication entailing submicron imagingAT & T CORP·Filed 1992·Granted Dec 27, 1994·14 cites·12 claims
- 1655US6828996B2Electron beam patterning with a heated electron sourceAPPLIED MATERIALS INC·Filed 2001·Granted Dec 7, 2004·3 cites·38 claims
- 1750US7315029B2Electrostatic deflection system with low aberrations and vertical beam incidenceAPPLIED MATERIALS INC·Filed 2005·Granted Jan 1, 2008·0 cites·19 claims
- 1838US4987311AElectron-detector diode biassing scheme for improved writing by an electron beam lithography machineETEC SYSTEMS INC·Filed 1989·Granted Jan 22, 1991·3 cites·5 claims
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