Inventor · disambiguated record
Kunihiro Furuya
Also filed as: FURUYA KUNIHIRO
16 granted patents·1 pending application·346 citations·filing 1995–2023
92Inventor score
Top patents by PatentIndex Score
17 records- 0195US7023226B2Probe pins zero-point detecting method, and proberTOKYO ELECTRON LTD·Filed 2004·Granted Apr 4, 2006·111 cites·7 claims
- 0293US6084215ASemiconductor wafer holder with spring-mounted temperature measurement apparatus disposed thereinTOKYO ELECTRON LTD·Filed 1998·Granted Jul 4, 2000·163 cites·6 claims
- 0386US12117485B2Wafer inspection systemTOKYO ELECTRON LTD·Filed 2023·Granted Oct 15, 2024·0 cites·1 claims
- 0484US11762012B2Wafer inspection systemTOKYO ELECTRON LTD·Filed 2022·Granted Sep 19, 2023·0 cites·2 claims
- 0580US9671459B2Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Jun 6, 2017·2 cites·5 claims
- 0676US11567123B2Wafer inspection systemTOKYO ELECTRON LTD·Filed 2021·Granted Jan 31, 2023·0 cites·3 claims
- 0774US11061071B2Wafer inspection system, wafer inspection apparatus and proberTOKYO ELECTRON LTD·Filed 2020·Granted Jul 13, 2021·0 cites·5 claims
- 0874US10976364B2Test head and wafer inspection apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Apr 13, 2021·0 cites·6 claims
- 0971US5708222AInspection apparatus, transportation apparatus, and temperature control apparatusTOKYO ELECTRON LTD·Filed 1995·Granted Jan 13, 1998·47 cites·4 claims
- 1067US8310257B2Contact structure for inspectionTAKASE SHINICHIRO·Filed 2010·Granted Nov 13, 2012·3 cites·18 claims
- 1167US7750654B2Probe method, prober, and electrode reducing/plasma-etching processing mechanismOCTEC INC·Filed 2005·Granted Jul 6, 2010·5 cites·27 claims
- 1267US2020064400A1Wafer inspection system, wafer inspection apparatus and proberTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1363US10753972B2Wafer inspection system, wafer inspection apparatus and proberTOKYO ELECTRON LTD·Filed 2017·Granted Aug 25, 2020·0 cites·7 claims
- 1461US9863977B2Method of contacting substrate with probe cardTOKYO ELECTRON LTD·Filed 2013·Granted Jan 9, 2018·1 cites·8 claims
- 1548US6239602B1Temperature managing apparatus for multi-stage containerTOKYO ELECTRON LTD·Filed 1999·Granted May 29, 2001·14 cites·14 claims
- 1645US11119122B2Position correction method, inspection apparatus, and probe cardTOKYO ELECTRON LTD·Filed 2019·Granted Sep 14, 2021·0 cites·6 claims
- 1745US9140726B2Support body for contact terminals and probe cardTOKYO ELECTRON LTD·Filed 2012·Granted Sep 22, 2015·0 cites·3 claims
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