Inventor · disambiguated record
Bo H. Vanderberg
Also filed as: VANDERBERG BO · VANDERBERG BO H
43 granted patents·7 pending applications·441 citations·filing 1999–2025
98Inventor score
Top patents by PatentIndex Score
50 records- 0194US7399980B2Systems and methods for beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2007·Granted Jul 15, 2008·20 cites·19 claims
- 0294US7227160B1Systems and methods for beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2006·Granted Jun 5, 2007·21 cites·20 claims
- 0394US7022984B1Biased electrostatic deflectorAXCELIS TECH INC·Filed 2005·Granted Apr 4, 2006·43 cites·19 claims
- 0493US6777696B1Deflecting acceleration/deceleration gapAXCELIS TECH INC·Filed 2003·Granted Aug 17, 2004·71 cites·12 claims
- 0591US8502173B2System and method for ion implantation with improved productivity and uniformityAXCELIS TECH INC·Filed 2012·Granted Aug 6, 2013·17 cites·38 claims
- 0691US7361914B2Means to establish orientation of ion beam to wafer and correct angle errorsAXCELIS TECH INC·Filed 2005·Granted Apr 22, 2008·15 cites·18 claims
- 0790US10037877B1Ion implantation system having beam angle control in drift and deceleration modesAXCELIS TECH INC·Filed 2017·Granted Jul 31, 2018·6 cites·20 claims
- 0890US7615763B2System for magnetic scanning and correction of an ion beamAXCELIS TECH INC·Filed 2006·Granted Nov 10, 2009·16 cites·27 claims
- 0989US6903350B1Ion beam scanning systems and methods for improved ion implantation uniformityAXCELIS TECH INC·Filed 2004·Granted Jun 7, 2005·46 cites·45 claims
- 1088US8637838B2System and method for ion implantation with improved productivity and uniformityEISNER EDWARD C·Filed 2011·Granted Jan 28, 2014·10 cites·20 claims
- 1188US8278634B2System and method for ion implantation with improved productivity and uniformityVANDERBERG BO H·Filed 2010·Granted Oct 2, 2012·14 cites·33 claims
- 1288US7507978B2Beam line architecture for ion implanterAXCELIS TECH INC·Filed 2006·Granted Mar 24, 2009·13 cites·18 claims
- 1387US7750320B2System and method for two-dimensional beam scan across a workpiece of an ion implanterAXCELIS TECH INC·Filed 2006·Granted Jul 6, 2010·10 cites·20 claims
- 1485US9679739B2Combined electrostatic lens system for ion implantationAXCELIS TECH INC·Filed 2015·Granted Jun 13, 2017·4 cites·20 claims
- 1584US7800083B2Plasma electron flood for ion beam implanterAXCELIS TECH INC·Filed 2007·Granted Sep 21, 2010·7 cites·12 claims
- 1683US10553392B1Scan and corrector magnet designs for high throughput scanned beam ion implanterAXCELIS TECH INC·Filed 2018·Granted Feb 4, 2020·2 cites·20 claims
- 1783US8124946B2Post-decel magnetic energy filter for ion implantation systemsRYDING GEOFFREY·Filed 2009·Granted Feb 28, 2012·7 cites·14 claims
- 1883US7550751B2Ion beam scanning control methods and systems for ion implantation uniformityAXCELIS TECH INC·Filed 2007·Granted Jun 23, 2009·8 cites·19 claims
- 1983US6992310B1Scanning systems and methods for providing ions from an ion beam to a workpieceAXCELIS TECH INC·Filed 2004·Granted Jan 31, 2006·18 cites·26 claims
- 2081US7586111B2Ion implanter having combined hybrid and double mechanical scan architectureAXCELIS TECH INC·Filed 2007·Granted Sep 8, 2009·5 cites·20 claims
- 2180US9318302B1Integrated extraction electrode manipulator for ion sourceAXCELIS TECH INC·Filed 2015·Granted Apr 19, 2016·3 cites·20 claims
- 2279US7897944B2Method and apparatus for measurement of beam angle in ion implantationAXCELIS TECH INC·Filed 2008·Granted Mar 1, 2011·4 cites·4 claims
- 2379US7064340B1Method and apparatus for ion beam profilingAXCELIS TECH INC·Filed 2004·Granted Jun 20, 2006·13 cites·16 claims
- 2478US11114270B2Scanning magnet design with enhanced efficiencyAXCELIS TECH INC·Filed 2018·Granted Sep 7, 2021·1 cites·20 claims
- 2578US6891174B2Method and system for ion beam containment using photoelectrons in an ion beam guideAXCELIS TECH INC·Filed 2003·Granted May 10, 2005·14 cites·49 claims
- 2677US8237135B2Enhanced low energy ion beam transport in ion implantationVANDERBERG BO H·Filed 2009·Granted Aug 7, 2012·4 cites·19 claims
- 2776US10483086B2Beam profiling speed enhancement for scanned beam implantersAXCELIS TECH INC·Filed 2015·Granted Nov 19, 2019·2 cites·17 claims
- 2876US7566886B2Throughput enhancement for scanned beam ion implantersAXCELIS TECH INC·Filed 2006·Granted Jul 28, 2009·5 cites·29 claims
- 2975US8963107B2Beam line design to reduce energy contaminationEISNER EDWARD C·Filed 2012·Granted Feb 24, 2015·3 cites·18 claims
- 3074US6879109B2Thin magnetron structures for plasma generation in ion implantation systemsAXCELIS TECH INC·Filed 2003·Granted Apr 12, 2005·10 cites·47 claims
- 3173US8760054B2Microwave plasma electron floodDIVERGILIO WILLIAM·Filed 2011·Granted Jun 24, 2014·4 cites·12 claims
- 3273US7435971B2Ion sourceAXCELIS TECH INC·Filed 2006·Granted Oct 14, 2008·7 cites·17 claims
- 3371US10573485B1Tetrode extraction apparatus for ion sourceAXCELIS TECH INC·Filed 2018·Granted Feb 25, 2020·1 cites·20 claims
- 3470US9443698B2Hybrid scanning for ion implantationVANDERBERG BO H·Filed 2008·Granted Sep 13, 2016·2 cites·22 claims
- 3570US8138484B2Magnetic scanning system with improved efficiencyVANDERBERG BO·Filed 2010·Granted Mar 20, 2012·3 cites·22 claims
- 3666US11037754B2Scan and corrector magnet designs for high throughput scanned beam ion implanterAXCELIS TECH INC·Filed 2019·Granted Jun 15, 2021·0 cites·20 claims
- 3766US8124947B2Ion implanter having combined hybrid and double mechanical scan architectureSIERADZKI MANNY·Filed 2009·Granted Feb 28, 2012·2 cites·13 claims
- 3866US7701230B2Method and system for ion beam profilingAXCELIS TECH INC·Filed 2007·Granted Apr 20, 2010·2 cites·14 claims
- 3966US2025140520A1Apparatus and method for two-dimensional ion beam profilingAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 4063US2025299907A1Liner with raised ribs for particle transport reductionAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 4154US7696494B2Beam angle adjustment in ion implantersAXCELIS TECH INC·Filed 2007·Granted Apr 13, 2010·0 cites·20 claims
- 4254US7361915B2Beam current stabilization utilizing gas feed control loopAXCELIS TECH INC·Filed 2005·Granted Apr 22, 2008·0 cites·20 claims
- 4352US2010065761A1Adjustable deflection optics for ion implantationAXCELIS TECH INC·Filed 2008·Application pending·0 cites
- 4448US8378313B2Uniformity of a scanned ion beamAXCELIS TECH INC·Filed 2011·Granted Feb 19, 2013·0 cites·21 claims
- 4541US6452196B1Power supply hardening for ion beam systemsAXCELIS TECH INC·Filed 1999·Granted Sep 17, 2002·8 cites·22 claims
- 4640US9711329B2System and method to improve productivity of hybrid scan ion beam implantersAXCELIS TECH INC·Filed 2015·Granted Jul 18, 2017·0 cites·14 claims
- 4740US2006017010A1Magnet for scanning ion beamsAXCELIS TECH INC·Filed 2004·Application pending·0 cites
- 4839US2011272567A1Throughput Enhancement for Scanned Beam Ion ImplantersAXCELIS TECH INC·Filed 2010·Application pending·0 cites
- 4937US2003030010A1Decaborane vaporizer having improved vapor flowFiled 2001·Application pending·0 cites
- 5036US2016189917A1Systems and methods for beam angle adjustment in ion implanters with beam decelarationAXCELIS TECH INC·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Bo H. Vanderberg files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →