Inventor · disambiguated record
Robert D. Rathmell
Also filed as: RATHMELL ROBERT D
17 granted patents·1 pending application·330 citations·filing 1987–2011
95Inventor score
Top patents by PatentIndex Score
18 records- 0194US7022984B1Biased electrostatic deflectorAXCELIS TECH INC·Filed 2005·Granted Apr 4, 2006·43 cites·19 claims
- 0293US6777696B1Deflecting acceleration/deceleration gapAXCELIS TECH INC·Filed 2003·Granted Aug 17, 2004·71 cites·12 claims
- 0391US7361914B2Means to establish orientation of ion beam to wafer and correct angle errorsAXCELIS TECH INC·Filed 2005·Granted Apr 22, 2008·15 cites·18 claims
- 0490US7615763B2System for magnetic scanning and correction of an ion beamAXCELIS TECH INC·Filed 2006·Granted Nov 10, 2009·16 cites·27 claims
- 0590US6881966B2Hybrid magnetic/electrostatic deflector for ion implantation systemsAXCELIS TECH INC·Filed 2003·Granted Apr 19, 2005·35 cites·34 claims
- 0688US7329882B2Ion implantation beam angle calibrationAXCELIS TECH INC·Filed 2005·Granted Feb 12, 2008·16 cites·21 claims
- 0785US6476399B1System and method for removing contaminant particles relative to an ion beamAXCELIS TECH INC·Filed 2000·Granted Nov 5, 2002·23 cites·23 claims
- 0883US6774377B1Electrostatic parallelizing lens for ion beamsAXCELIS TECH INC·Filed 2003·Granted Aug 10, 2004·19 cites·20 claims
- 0983US6534775B1Electrostatic trap for particles entrained in an ion beamAXCELIS TECH INC·Filed 2000·Granted Mar 18, 2003·30 cites·18 claims
- 1080US8941968B2Heated electrostatic chuck including mechanical clamp capability at high temperatureJUSTESEN PERRY J I·Filed 2011·Granted Jan 27, 2015·6 cites·24 claims
- 1174US7112809B2Electrostatic lens for ion beamsAXCELIS TECH INC·Filed 2004·Granted Sep 26, 2006·10 cites·32 claims
- 1273US4816693AApparatus and method for uniform ion dose controlNAT ELECTROSTATICS CORP·Filed 1987·Granted Mar 28, 1989·19 cites·26 claims
- 1370US6989545B1Device and method for measurement of beam angle and divergenceAXCELIS TECH INC·Filed 2004·Granted Jan 24, 2006·13 cites·25 claims
- 1462US7982195B2Controlled dose ion implantationAXCELIS TECH INC·Filed 2004·Granted Jul 19, 2011·9 cites·13 claims
- 1561US7102146B2Dose cup located near bend in final energy filter of serial implanter for closed loop dose controlAXCELIS TECH INC·Filed 2004·Granted Sep 5, 2006·4 cites·38 claims
- 1658US8797706B2Heated annulus chuckLEE WILLIAM DAVIS·Filed 2011·Granted Aug 5, 2014·1 cites·20 claims
- 1754US7361915B2Beam current stabilization utilizing gas feed control loopAXCELIS TECH INC·Filed 2005·Granted Apr 22, 2008·0 cites·20 claims
- 1840US2006017010A1Magnet for scanning ion beamsAXCELIS TECH INC·Filed 2004·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Robert D. Rathmell files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →