Inventor · disambiguated record
Takafumi Miyaharu
Also filed as: MIYAHARU TAKAFUMI
19 granted patents·3 pending applications·15 citations·filing 2006–2025
89Inventor score
Top patents by PatentIndex Score
22 records- 0196US12153343B2Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2022·Granted Nov 26, 2024·2 cites·22 claims
- 0292US12072638B2Exposure apparatus, exposure method, and method of manufacturing articleCANON KK·Filed 2023·Granted Aug 27, 2024·1 cites·14 claims
- 0387US11656547B2Imprint apparatus, imprinting method, and product manufacturing methodCANON KK·Filed 2020·Granted May 23, 2023·2 cites·15 claims
- 0486US10634995B2Position detector, position detection method, imprint apparatus, and product manufacturing methodCANON KK·Filed 2017·Granted Apr 28, 2020·3 cites·8 claims
- 0583US2025044683A1Imprint method, imprint apparatus, and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0682US10761316B2Illumination apparatus, optical apparatus, imprint apparatus, projection apparatus, and method of manufacturing articleCANON KK·Filed 2017·Granted Sep 1, 2020·2 cites·13 claims
- 0782US10754255B2Exposure apparatus and article manufacturing methodCANON KK·Filed 2019·Granted Aug 25, 2020·2 cites·15 claims
- 0874US11835869B2Exposure apparatus, exposure method, and method of manufacturing articleCANON KK·Filed 2022·Granted Dec 5, 2023·0 cites·12 claims
- 0964US12326668B2Detection apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2022·Granted Jun 10, 2025·0 cites·11 claims
- 1064US9595447B2Detection apparatus, imprint apparatus, and method of manufacturing productsCANON KK·Filed 2015·Granted Mar 14, 2017·1 cites·19 claims
- 1161US8013976B2Exposure apparatus, exposure method, and device fabrication methodCANON KK·Filed 2008·Granted Sep 6, 2011·1 cites·9 claims
- 1259US12023850B2Position detection apparatus, imprint apparatus, and article manufacturing methodCANON KK·Filed 2022·Granted Jul 2, 2024·0 cites·12 claims
- 1358US12429795B2Detection apparatus, lithography apparatus, and article manufacturing methodCANON KK·Filed 2023·Granted Sep 30, 2025·0 cites·14 claims
- 1455US2025336843A1Alignment mark, alignment mark pair, substrate, and manufacturing method of semiconductor deviceCANON KK·Filed 2025·Application pending·0 cites
- 1554US9594315B2Detection apparatus, lithography apparatus and method of manufacturing articleCANON KK·Filed 2014·Granted Mar 14, 2017·0 cites·20 claims
- 1651US11204548B2Imprint apparatus, imprinting method, and method for manufacturing articleCANON KK·Filed 2017·Granted Dec 21, 2021·0 cites·13 claims
- 1751US7671967B2Exposure apparatus and exposure methodCANON KK·Filed 2006·Granted Mar 2, 2010·1 cites·5 claims
- 1845US10386737B2Imprint apparatus and method for producing articleCANON KK·Filed 2016·Granted Aug 20, 2019·0 cites·17 claims
- 1943US8253931B2Exposure apparatus and device manufacturing methodMIYAHARU TAKAFUMI·Filed 2009·Granted Aug 28, 2012·0 cites·17 claims
- 2042US2013221556A1Detector, imprint apparatus and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 2139US10642171B2Imprint apparatus, imprint method, and method for producing articleCANON KK·Filed 2016·Granted May 5, 2020·0 cites·17 claims
- 2238US8497978B2Exposure apparatus and method of manufacturing deviceMIYAHARU TAKAFUMI·Filed 2010·Granted Jul 30, 2013·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →