Inventor · disambiguated record
Marc Smits
Also filed as: SMITS MARC
12 granted patents·1 pending application·23 citations·filing 2012–2023
86Inventor score
Top patents by PatentIndex Score
13 records- 0195US10987705B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2020·Granted Apr 27, 2021·4 cites·20 claims
- 0294US9981293B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsMAPPER LITHOGRAPHY IP BV·Filed 2016·Granted May 29, 2018·9 cites·29 claims
- 0392US11738376B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2021·Granted Aug 29, 2023·2 cites·20 claims
- 0488US10632509B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2018·Granted Apr 28, 2020·4 cites·31 claims
- 0583US12202019B2Method and system for the removal and/or avoidance of contamination in charged particle beam systemsASML NETHERLANDS BV·Filed 2023·Granted Jan 21, 2025·0 cites·20 claims
- 0671US9224580B2Plasma generatorMAPPER LITHOGRAPHY IP BV·Filed 2012·Granted Dec 29, 2015·4 cites·19 claims
- 0766US2023107989A1Replaceable module for a charged particle apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0864US12476075B2Stack alignment techniquesASML NETHERLANDS BV·Filed 2022·Granted Nov 18, 2025·0 cites·20 claims
- 0962US11961698B2Replaceable module for a charged particle apparatusASML NETHERLANDS BV·Filed 2021·Granted Apr 16, 2024·0 cites·20 claims
- 1056US9123507B2Arrangement and method for transporting radicalsMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Sep 1, 2015·0 cites·14 claims
- 1152US9484187B2Arrangement for transporting radicalsMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Nov 1, 2016·0 cites·23 claims
- 1251US11599028B2Methods and systems for clamping a substrateASML NETHERLANDS BV·Filed 2020·Granted Mar 7, 2023·0 cites·20 claims
- 1345US9506881B2Method and apparatus for predicting a growth rate of deposited contaminantsMAPPER LITHOGRAPHY IP BV·Filed 2012·Granted Nov 29, 2016·0 cites·16 claims
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